JPH0252995B2 - - Google Patents
Info
- Publication number
- JPH0252995B2 JPH0252995B2 JP57230153A JP23015382A JPH0252995B2 JP H0252995 B2 JPH0252995 B2 JP H0252995B2 JP 57230153 A JP57230153 A JP 57230153A JP 23015382 A JP23015382 A JP 23015382A JP H0252995 B2 JPH0252995 B2 JP H0252995B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- radiation
- scintillator
- type semiconductor
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005855 radiation Effects 0.000 claims description 47
- 239000004065 semiconductor Substances 0.000 claims description 42
- 230000001681 protective effect Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 42
- 238000005259 measurement Methods 0.000 description 14
- 238000001514 detection method Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 238000005192 partition Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004347 surface barrier Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57230153A JPS59122988A (ja) | 1982-12-29 | 1982-12-29 | 放射線計測素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57230153A JPS59122988A (ja) | 1982-12-29 | 1982-12-29 | 放射線計測素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59122988A JPS59122988A (ja) | 1984-07-16 |
| JPH0252995B2 true JPH0252995B2 (en]) | 1990-11-15 |
Family
ID=16903421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57230153A Granted JPS59122988A (ja) | 1982-12-29 | 1982-12-29 | 放射線計測素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59122988A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7019302B2 (en) | 2000-08-03 | 2006-03-28 | Hamamatsu Photonics K.K. | Radiation detector, scintillator panel, and methods for manufacturing same |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61288186A (ja) * | 1985-06-14 | 1986-12-18 | Hamamatsu Photonics Kk | シンチレ−タ |
| JPS6351291U (en]) * | 1986-09-20 | 1988-04-06 | ||
| FR2628562A1 (fr) * | 1988-03-11 | 1989-09-15 | Thomson Csf | Dispositif d'imagerie a structure matricielle |
| JPH02277000A (ja) * | 1989-04-18 | 1990-11-13 | Seiko Instr Inc | Ｘ線イメージセンサー |
| JPH02276996A (ja) * | 1989-04-18 | 1990-11-13 | Seiko Instr Inc | Ｘ線イメージセンサー |
| GB9115259D0 (en) * | 1991-07-15 | 1991-08-28 | Philips Electronic Associated | An image detector |
| US5132539A (en) * | 1991-08-29 | 1992-07-21 | General Electric Company | Planar X-ray imager having a moisture-resistant sealing structure |
| US5463225A (en) * | 1992-06-01 | 1995-10-31 | General Electric Company | Solid state radiation imager with high integrity barrier layer and method of fabricating |
| US5401668A (en) * | 1993-09-02 | 1995-03-28 | General Electric Company | Method for fabrication solid state radiation imager having improved scintillator adhesion |
| US7019301B2 (en) | 1997-02-14 | 2006-03-28 | Hamamatsu Photonics K.K. | Radiation detection device and method of making the same |
| AU4168699A (en) | 1998-06-18 | 2000-01-05 | Hamamatsu Photonics K.K. | Method of organic film deposition |
| US7034306B2 (en) | 1998-06-18 | 2006-04-25 | Hamamatsu Photonics K.K. | Scintillator panel and radiation image sensor |
| DE60138090D1 (de) * | 2000-01-13 | 2009-05-07 | Hamamatsu Photonics Kk | Strahlungsbildsensor und szintillatorplatte |
| JP4398065B2 (ja) | 2000-05-19 | 2010-01-13 | 浜松ホトニクス株式会社 | 放射線検出器 |
| JP4234304B2 (ja) | 2000-05-19 | 2009-03-04 | 浜松ホトニクス株式会社 | 放射線検出器 |
| WO2001088568A1 (fr) | 2000-05-19 | 2001-11-22 | Hamamatsu Photonics K.K. | Detecteur de rayonnement et procede de fabrication de ce detecteur |
| KR100693105B1 (ko) * | 2005-04-26 | 2007-03-12 | 라드텍주식회사 | 방사선투과영상획득용 검출기 모듈을 제작하기 위한구조화된 픽셀형 신티레이터의 제조방법 |
| JP5460572B2 (ja) | 2010-12-27 | 2014-04-02 | 富士フイルム株式会社 | 放射線画像検出装置及びその製造方法 |
-
1982
- 1982-12-29 JP JP57230153A patent/JPS59122988A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7019302B2 (en) | 2000-08-03 | 2006-03-28 | Hamamatsu Photonics K.K. | Radiation detector, scintillator panel, and methods for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59122988A (ja) | 1984-07-16 |
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